1 【Resume Slide on Automation Project】 SCADA Basis Automation SystemJul. 9th, 2015 Tomoya Ito

2 A. Examples of Automation Projects lead. - 1A. Examples of Automation Projects lead. 　　 Semiconductor Life Cycle 　　 Sapphire Crystalize Automation, Trial experiment 　　　- 3. SAW Evaluation, Tool for Data Mining (B. Reference) will be added.

3 1-1. System Configuration

4 1340.50 1-2. Issue Analysis Life Cycle Evaluation System 7:12①Switch ON by manual ②Record the measurements by manual. ③Put the data to Excel files. 1. Took time to press the manufacturing cost. 2. Couldn’t set additional points to measure. 3. Evaluation Accuracy couldn’t be increased any more due to the restriction of measurement points.

5 1-2A. Issue Analysis before carried out DevelopmentOverview 1. Lot Management possibly reduced the yield of whole process 2. Manual/Labor works took time than the proper level on labor cost. 3. Prober Equipment Capacity was close to 100%.　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　 Most Heavily Loaded in Process

6 1-3. Evaluation Algorithm★Method ★Overview 《Objective》　 　　　　　 Life Cycle measurement was designed with the for 1000 minutes(16.7 hours) measurement. 《Target》　1) Measurement points’ reduction. 　　　　　 2) Shorten Measurement Time1000min→240min 　　Evaluation Algorithm designed by Weibulll Distribution 　　Weibull Distribution: 　λ(t)=1-exp(-t^m/b) 　　Iteration through the equation D=|y(t)-λ(t)|2<ε(=1e-6 Before Development ●Graph 2点測定により関数内挿 Improved

7 1-4. System Figuration on the monitorWhile measurement, Update expected target.

8 2-1. Sapphire Crystal Process Automation制御プログラム実装 載せるアプリケーション：VB6、LabVIEW Controller I/O: 2 Analogue Inputs 2 Analogue Load Cell 0-10V/0-80Hz 0-38mm/min サファイア基板 Ｓｅｅｄ（種） るつぼ 引上げ速度 引上げ位置 荷重変化 温度 金型 Frequency 1～10Hz Input: Crystal weight via Road Cell 《CCD Camera Vision》 Output: Inverter　0-10V/0-80Hz 　　　Pull up speed, motor driver, 0-xxV/0-38mm/min Control Specification 製品引上げ中

9 2-2. Control Algorithm Weight value RC can be obtained by the following Equation, RC(X)＝A･X2＋B･X＋C　　　　　　　　　　････(1) Thus, Derivation of the former Equation can be Expressed as following, Lim(X)＝K*D{RC(X)}/Dx＝K(2A･X＋B) ････(2) Velocity Control Zone Heat Control Zone X [mm] Lim [mm] production Technology center

10 SAW Process Management3-1. System Line up SAW Process Management Average Value Control Chart Management - Failure Detection In Excel SAW Evaluation DB Feedback to the equipment Timesheet management Data storage In Access SAW Data Analyze System　 Zone/Tip oriented Analysis data Mapping on the surface - Early detection of failure on tip Histogram Surface Data Analyzing Average on zone and sigma Detection of the process Fluctuation In LABVIEW